自动化技术中的纳米定位系统:采用EtherCAT的数字压电控制器

来源:PI普爱纳米位移公司    关键词:PI, 压电控制器,    发布时间:2019-06-21

设置字体:

高精度、基于压电的定位系统在工业环境中的应用日益增多;半导体制造就是一个典型示例。因此,作为驱动技术和定位系统的解决方案供应商,PI (Physik Instrumente)推出了新型E-727压电控制器。


如今,数字控制器可由ACS运动控制的所有工业运动控制器通过EtherCAT进行操作,因此可作为“智能驱动器”集成到自动化环境中,从而用于双轴或三轴基于压电的纳米定位系统,而无论这些系统是与电容式、压阻式还是应变片传感器一起工作。


         P-I控制器带有两个针对压电操作优化过的陷波滤波器,可实现高控制带宽(20千赫兹)。智能伺服算法可适当地缩短稳定时间,从而使重复精度达到亚纳米范围。数字控制器的更多亮点包括用于机械部件和电子元件的四阶多项式线性化、集成数据记录器、用于快捷而迅速地交换系统组件的ID芯片以及从属可编程漂移补偿。此外,还包括动态数字线性化选项。在动态周期性应用的情况下,此DDL函数可将相位偏移和轨迹误差降低到难以识别的水平。这对于扫描务必识别特定位置并再次精确到达该位置的应用尤为重要。


关于PI

PI(Physik Instrumente)是全球精密定位技术市场领先者,多年来以其优质产品而享誉世界。在使用压电或电机驱动器的标准及OEM产品的开发和制造方面,PI拥有40年的历史。ACS运动控制是多轴高精度驱动器系统用模块化运动控制器的全球领军开发商和制造商,通过收购其大多数股份,PI在为要求最高精度和动态的工业应用提供整套系统的方面又向前迈进了重要一步。PI集团遍布全球,除了在德国设有四个基地之外,在其他国家和地区还设立了十五个销售和服务分部。


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