中国激光产业中的那些“卡脖子”技术

来源:光电汇    关键词:激光微孔加工, 超快激光, 飞秒激光技术,    发布时间:2019-06-27

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前有美国商务部将44家中国企业和科研院所列入“未经核实”名单,后有中美贸易战持续升级,加税名单出台,对各行业领域带来了影响。激光产业属于高新技术产业,激光作为一种高效加工工具,对于推动中国经济转型升级具有不可替代的作用,而缺少核心元器件和关键材料是我国当前乃至未来高功率激光光源产业发展的主要瓶颈,高性能半导体激光器芯片大量进口,单芯片功率≥12 W受到禁运。迅速提升我国高功率光纤激光光源技术、关键器件、核心原材料的国产化和产业化水平,有助于扭转我国激光市场整体格局。

 

01主要卡脖子技术

(1)窄线宽波长稳定976nm/15 W半导体激光芯片及万瓦半导体激光器技术

随着技术发展,万瓦级激光器对抽运源芯片的出射功率、亮度及稳定性要求越来越高。976nm波长窄线宽及波长稳定技术可有效降低系统热管理难度,提高系统耦合效率和光束质量,成为实现万瓦级激光器核心关键技术。

 

我们还需要在以下技术方向努力:

针对高亮度直接半导体激光器及工业万瓦级激光器对前端抽运源要求,解决新一代激光芯片整体设计及外延制备关键核心技术;

 

芯片级波长稳定技术,通过光栅刻写及二次外延完成内置光栅制备,实现波长稳定,满足万瓦级光纤激光器所需抽运源及高亮度直接半导体激光器的应用需求;

 

开展腔面工程技术研究,提升腔面损伤阈值,实现高质量、高损伤阈值的芯片腔面;

 

突破芯片级别的高偏振特性技术。

 

(2)高功率增益光纤及其万瓦激光器技术

目前国际商用有源光纤通过对光纤的波导、掺杂分布、掺杂工艺,实现了有源光纤在3kW及以上良好的光束质量输出性能,抑制高功率下模式不稳定性,实现高功率下光纤模式的稳定输出与高稳定输出技术是一项关键技术。

 

在高功率下,光纤失效最大的原因之一是光纤的包层出现性能退化失效,光致暗化性能如何表征并进行抑制是现有高功率用途有源光纤面临的难点。在光纤芯径逐渐增大、功率提高到3kW后,光纤的光致暗化性能测量以及通过材料手段进行抑制是高功率有源光纤的一个核心关键技术。需要研制功率输出大于十万瓦级的全光纤工业级激光器产品(要求300μm芯径输出),温升曲线低于万分之五的高品质合束器,高精度光纤拉锥-切割-熔接-涂覆一体化光纤工艺装备。

 

(3)千瓦级超快(皮秒/飞秒)激光器关键技术

超快激光器通常采用主振荡器/功率放大器结构(MOPA),锁模超快激光种子源输出高重频、低能量的皮秒/飞秒种子脉冲,经过后续放大和一系列处理,得到高功率皮秒/飞秒激光器,攻克超快激光种子源技术、脉冲展宽压缩及时序控制技术、固体多级多程放大技术、大口径光纤啁啾脉冲放大技术、碟片高功率放大技术等关键技术。

 

(4)极端条件激光先进制造关键技术

大厚板、高强钢、有色金属材料激光焊接技术,钛合金、铝合金,大厚构件材料中壁板变厚度、大曲面,需要深入探讨影响多模激光在大厚构件上的焊接加工精度和效率的关键因素及物理机制:

 

研究超大型工件现场激光再制造修复技术,可在核电、燃气轮机、水轮发电机、轮船和冶金、石化、铁道运输等领域得到进一步应用;

 

超结构、超材料、超器件激光微纳制造技术,近年来超结构在航空航天、纳米机器人、功能性微纳器件、可植入超精密医疗器械等领域中正发挥日益重大的作用,研究极微量物质乃至分子原子的生长、排布、组装、改性以及去除过程的精确控制规律,能推动实现激光微纳制造微器件高效率、高精度制造。

 

(5)激光增材制造新技术研究

增材制造技术主要利用高能束热源将粉末或丝材分层沉积到基体上,最终实现原始尺寸恢复或沿成形基面快速成形制造。开发钛铝、耐高温合金、光敏树脂、细胞等新型3D打印材料,发展微纳增材制造、多色材料增材制造、纤维复合材料增材制造等打印设备,突破扫描振镜、3D打印激光器及控制系统、高速高精导轨、氧/尘/水传感器等核心部件,拓展3D扫描、创意设计、3D打印制造服务等应用及服务。

 

02激光器仍然是国内激光发展的核心

(1)半导体激光器

作为一种新型光源,以其结构紧凑、光束质量好、寿命长及性能稳定等优势,可用作光纤激光器、固体激光器抽运源,目前占整个激光领域产品销售总额的60%。到2023年,预计我国半导体激光产业市场规模将接近300亿元。氮化镓基蓝绿光半导体激光器是第三代半导体材料的重要方向。美国TeraDiode公司已开发出一款超高亮度的千瓦量级直接半导体激光器,使输出光束的光束参量积达到了3.75mm-mrad,在单一中心波长下该激光器的输出功率达到了2030W。

 

(2)光纤激光器

光纤激光器占全球激光器份额超过50%。粗略统计我国去年光纤激光器的出货量超过8万台。以公司来说,IPG光子仍然占据非常高的市场份额,国内的锐科激光已有超过2万瓦激光器,海富光子、中科光汇、创鑫激光等也都各有所长。

 

(3)超快激光器

以皮秒与飞秒激光器为代表的超快激光自2003年后开始发展,在过去的10多年中,商用超快激光器的平均功率增加了一百倍,发展重点为千瓦级超快激光器。德国耶拿大学、夫琅禾费应用光学和精密工程研究所以及Active Fiber Systems等组织机构的研究人员携手欧盟ELI(Extreme Light Infrastructure)项目构建了一个能提供高达6fs、200W的激光系统,刷新了世界纪录。以相干、光谱物理、通快、NKT、EKSPLA、Light Conversion、Lumentum、EdgeWave、Amplitude等公司为代表,在超快激光器领域占有全球近90%的市场份额。

 

吉林大学、清华大学、西安交通大学、中科院物理所/光机所等都在大力推进超快激光科研;华日激光、安扬激光、武汉虹拓新技术、卓镭激光等国内企业也在大力推进产业化。2018年全球超快激光器产值超过8亿美元,未来三年还会出现加快增长,至2020年市场产值可达14亿美元。在中国,由消费电子产品加工带来的超快激光微加工应用需求量会大幅增加。

 

(4)紫外激光器

2018年国内紫外激光器市场快速增长,总销售数量超过6000台,同比增长超过70%。除了光谱物理、相干、通快、英诺激光等外国公司占有高端市场,国内品牌也得到长足发展,华日激光、英谷激光、瑞丰恒、道中道激光等企业都得到了良好的增长。紫外激光设备的发展主要表现在打标与精密切割方面,在消费电子器件、FPC板、玻璃、聚合物等应用领域均有不错的加工效果。

 

以激光器应用的热门领域来看,激光雷达和激光照明两个应用市场增长不错。激光雷达市场增长的主要驱动力来自于无人机、自动驾驶的汽车、机器人、军事及安全等领域。当前,激光雷达主要有两种类型:一种是多束激光并排绕轴旋转360度,每束激光扫描一个平面,但分辨率的下降使车辆行驶中检测障碍物时易产生盲点,从而带来安全隐患。另一种是固态激光雷达。该技术以美国Quanergy Systems公司的固态激光雷达传感器为首,采用相控阵扫描替代机械扫描方式,可以大幅降低生产成本。

 

激光照明的一部分市场是汽车激光照明,主要是汽车头灯。宝马、奥迪等知名汽车制造商都采用了激光照明系统。另一部分市场是安全激光照明,如为夜晚环境中骑行的人们提供警示性标识。

 

03激光加工发展趋势

随着光纤激光器的技术不断突破与价格下降,光纤激光切割机呈现良好的增长,尤其是中小功率切割机广受欢迎,高功率激光切割需求也快速恢复。激光加工向智能化、微细、超大、极端制造方向发展。

 

(1)激光焊接、切割

激光焊接将首先在汽车制造、高速火车和飞机制造、农业机械和造船等领域铺开,这将是一个未来的增长点。

 

(2)激光清洗

利用高能激光束与工件表面要去除的物质相互作用,发生瞬间蒸发或剥离,无需各种化学清洗剂,绿色无污染。可用于清除油漆、油污、氧化层、清洗螺杆、除锈、清洗焊缝等。激光清洗在微电子、建筑、核电站、汽车制造、医疗、文物保护、钢铁除锈和模具去污等领域拥有巨大市场空间。

 

(3)金属3D打印

金属3D打印即增材制造,SLM系统的年销量超过1000台,其中使用的激光源主要是光纤激光器、CO2激光器和超快光纤激光器,功率范围30W到1kW以上。3D打印的精细度也越来越高,打印出的精细结构的分辨率已经达到微米量级。

 

(4)激光精密加工和微细加工

随着中国集成电路的大力发展,用于印刷电路板和消费电子产品微加工系统大幅增长。生物技术和医疗设备领域的应用也给微细加工提供了广阔的发展空间。中国手机市场的蓬勃发展给平板显示制造商带来了巨大的商机,用于制造OLED显示器的准分子激光器在亚洲市场势头强劲。

 

04总结

综上所述,我国高亮度高功率激光器虽然经过十多年的不断攻关已取得了一定的成绩,但是缺少核心元器件和关键材料,是我国当前乃至未来激光光源产业发展的主要瓶颈。

 

(1)打破我国半导体激光器产业“有器无芯”的局面,开发出窄线宽波长稳定的976 nm/15 W应用于高功率半导体抽运源及直接半导体激光器应用的激光芯片;

 

(2)迅速提升我国高功率光纤激光光源技术、关键器件、核心原材料的及国产化和产业化水平,扭转我国激光市场整体格局的必由之路;

 

(3)大力攻克千瓦飞秒激光技术与关键核心器件,开发固体多级多层放大技术和碟片激光放大技术,实现核心关键器件的国产化,完善超快激光器全产业链;

(4)研究超快激光微孔加工、超快激光高效高质量切割以及超快激光键合封装技术,跟踪显示产业、微电子产业发展,加强产业链配套能力建设。

 

 

 者:唐霞辉 教授 华中科技大学激光加工国家工程研究中心

 

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