清华大学成功研发用于光刻机的高端激光干涉测量仪

来源:科技日报    关键词:激光干涉测量仪器, 光刻机,    发布时间:2019-06-05

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“针对光刻机等苛刻测量环境中实现多自由度干涉测量的需求,我们提出了基于棱镜误差矢量分析的单体集成多轴干涉仪组件设计方法,研发出从2轴到5轴的系列化单体式多轴干涉仪组件,打破了国外企业的垄断和对我国的出口限制。”4日,清华大学长聘教授、精密仪器系学术委员会主任李岩告诉记者。


激光干涉测量是实现超精密测控和微纳尺度测量的最有效手段之一。在国家重大科技专项“极大规模集成电路制造装备及成套工艺”(02专项)等项目支持下,由李岩等完成的“高测速多轴高分辨率激光干涉测量技术与仪器”项目,突破一系列关键技术瓶颈,形成了测量新方法、系统及仪器。


李岩介绍,项目实现了从干涉仪组件、信号探测解调到多自由度探测方案设计的全链条自研开发的高测速、多轴大量程、高分辨率激光干涉测量系统。


截至目前,项目团队所研发的光刻机用双频激光干涉仪系统,应用到我国自研光刻机工件台样机研发过程中,累计应用50余台套,满足了光刻机双工件台样机的精密测量需求,减轻了对国外高端干涉仪的依赖,降低了其产品对我国出口限制所造成的研发风险。


李岩说,比如项目开发的亚纳米分辨率可溯源外差干涉仪,应用到激光多维测量系统研究与开发的比对检定研究中,找出了激光多维测量系统非线性误差原因,并用专门的电路加以校正,提高了相关单位激光多维测量系统的性能,所提出的可溯源干涉测量新方法,为摩尔单位采用阿伏伽德罗常数重新定义作出了贡献。


“项目的成功,打破了外国对我国高端激光干涉测量仪器的限制和垄断,为我国高端装备和仪器研发提供性能稳定且不受制于外国的测量及溯源能力,丰富了激光干涉测量理论与技术,具有非常重要的技术、经济和社会效益。”李岩说。

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